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FS4001 Small Flow Gas Mass Flow Sensor

2026-04-15

Nexisense FS4001 Small Flow Gas Mass Flow Sensor

High-precision Small Flow Gas Mass Flow Sensor | Nexisense FS4001 MEMS Turndown Ratio 100:1 No Compensation Required

Traditional volumetric or differential pressure flow sensors often suffer from decreased accuracy, large pressure drop, and the need for temperature and pressure compensation in micro flow scenarios, resulting in complex systems, slow response, and difficult maintenance. Nexisense FS4001 series small flow gas mass flow sensor is based on the MEMS thermal mass flow principle, directly measures mass flow without compensation, has a wide turndown ratio, rapid response, and easy installation, providing a high-stability solution for gas process control.

Three Core Selling Points:

  • High Precision and Wide Turndown Ratio: Accuracy ±(1.5+0.5FS)%, repeatability ±0.25%, turndown ratio 100:1. Even extremely small starting flows can be measured accurately, far superior to traditional sensors.

  • No Compensation Required, Easy Integration: Adopts MEMS thermal mass flow chip, no temperature and pressure compensation required. Supports RS232 digital output and 0.5~4.5VDC analog output, convenient for access to automation systems, realizing real-time monitoring and data integration.

  • Low Pressure Drop and Fast Response: Maximum pressure drop is only 350Pa, response time as fast as 4ms, low power consumption design, suitable for micro gas flow applications with limited space or minimal impact on the system.

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Overview

Nexisense FS4001 series small flow gas mass flow sensor is specially designed for the measurement and process control of various small flow gases. All sensors in this series are made with the company's self-developed micro-electro-mechanical system (MEMS) flow sensing chip and are suitable for various clean gases. Unique packaging technology allows it to be used with various pipe diameters. It has low cost, easy installation, and does not require temperature and pressure compensation, and can replace traditional volumetric or differential pressure flow sensors.

The sensor is based on the thermal mass flow metering principle and integrates multiple sensors on a single chip, significantly improving the turndown ratio. Nexisense has optimized the electronic processing unit and output interface, strengthening industrial-grade anti-interference capability and system integration features. System integrators can connect the sensor to automated control systems through RS232 or analog output to realize real-time collection, trend analysis, and alarm linkage of flow data; engineering contractors can quickly deploy in gas analysis, laboratory, medical, combustion control and other industry projects to ensure the controllability, traceability, and high reliability of the gas flow process.

This series of sensors features high sensitivity, high zero-point stability, high stability across the full range, low power consumption, low pressure drop, and fast response time. It is the preferred equipment for precision measurement of micro gases in industrial sites and laboratories.

Key Advantages

Nexisense FS4001 small flow gas mass flow sensor has been optimized in chip design, packaging process, signal processing, and output interface, with emphasis on stability, high precision, anti-interference capability, and easy integration to meet the stringent requirements of B2B projects for micro flow measurement.

  1. MEMS Thermal Mass Flow Principle and High Precision
    Adopts thermal mass flow metering technology to directly measure gas mass flow without temperature and pressure compensation. Accuracy ±(1.5+0.5FS)%, repeatability ±0.25%, zero output drift ±30mV, output drift ±0.12%/℃. Even under extremely small flows, it maintains high accuracy and good repeatability, especially suitable for micro gas scenarios requiring precise control.

  2. Wide Turndown Ratio and Strong Adaptability
    Optional maximum flow rates: 30, 100, 200, 500, 1000 sccm, turndown ratio 100:1. Operating temperature -10~+55℃, storage temperature -20~+65℃, operating humidity 95%RH (no condensation, no icing). Maximum working pressure 0.5MPa, low pressure drop (maximum 350Pa), suitable for various clean gas media.

  3. Low Maintenance and Anti-interference Design
    High integration of MEMS chip, sensor weight only 15g, mechanical interface is detachable hose connector, easy to install. Low power consumption design, operating power supply 8~24VDC, 50mA. Unique packaging technology improves stability and reliability, with strong resistance to environmental interference, suitable for long-term stable operation.

  4. Flexible Output and Easy Integration
    Output mode is linear analog (0.5~4.5VDC) or RS232 digital output, convenient for access to various control systems. Response time 4, 8, 16, 33, 65, 131ms optional (default 65ms), supporting fast process control. Optimal measurement accuracy is obtained after 1 minute of warm-up.

These advantages make Nexisense FS4001 not only a flow sensor, but also a reliable node that can be deeply integrated into gas process control systems, helping users simplify system design, reduce costs, and improve control accuracy.

Technical Specifications

Basic Technical Parameters

  • Accuracy: ±(1.5+0.5FS)%

  • Maximum Flow: 30, 100, 200, 500, 1000 sccm

  • Turndown Ratio: 100:1

  • Power Supply: 8~24VDC, 50mA

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Detailed Technical Parameters

Parameter ItemSpecification Description
Product NameFS4001 Mass Flow Sensor
Maximum Flow30, 100, 200, 500, 1000 sccm
Turndown Ratio100:1
Accuracy±(1.5+0.5FS)%
Repeatability±0.25%
Zero Output Drift±30mV
Output Drift±0.12%/℃
Response Time4, 8, 16, 33, 65, 131ms (optional)
Power Supply8~24VDC, 50mA
Output ModeLinear, RS232 / Analog 0.5~4.5VDC
Maximum Flow Pressure Drop350Pa
Maximum Working Pressure0.5MPa
Operating Temperature-10~+55℃
Storage Temperature-20~+65℃
Operating Humidity95%RH (no icing, no condensation)
Weight15g
Mechanical InterfaceDetachable hose connector
Standard Calibration GasAir (20℃, 101.325kPa)

Notes: 1. To ensure sensor measurement accuracy, preheating for one minute is required before use; 2. The above parameters are measured at 20℃ and 101.325kPa. Product application customization can be made according to customer environmental requirements.

Application Scenarios

Nexisense FS4001 small flow gas mass flow sensor is widely used in the following scenarios that require precise micro gas flow measurement:

  1. Gas Analyzers and Laboratory Equipment: Precisely control carrier gas or reaction gas flow, support a variety of clean gases, and achieve high-precision gas mixing and analysis.

  2. Medical and Respiratory Equipment: Micro flow monitoring of oxygen, anesthetic gas, etc. The low pressure drop design reduces the impact on the system and ensures safety and reliability.

  3. Combustion Control and Environmental Monitoring: Boiler and burner gas flow control, supporting fast response and stable output to improve combustion efficiency and emission control accuracy.

  4. Semiconductor and Electronic Manufacturing: Precise metering of process gases (such as N2, Ar). The high integration of MEMS chips is suitable for cleanroom environments.

  5. Instrument Integration: Embedded as a core flow module in analyzers, detection equipment or automation systems to achieve intelligent gas process control.

Wiring and Installation

FS4001 sensor installation is convenient, with a detachable hose connector as the mechanical interface. Installation tips are as follows:

  • Preheat the sensor for 1 minute before installation to ensure optimal measurement accuracy.

  • When connecting gas pipelines, ensure the medium is clean and dry gas to avoid contaminating the sensor chip.

  • Electrical wiring: Power supply 8~24VDC (50mA), analog output connected to 0.5~4.5VDC signal line, RS232 for digital communication.

  • Use shielded cables to reduce interference and correctly configure communication parameters.

  • Horizontal installation of the sensor is preferred, avoiding strong vibration or strong magnetic field environments.

  • Regularly check the sealing of pipeline connections and keep the sensor clean.

For detailed wiring diagrams and communication protocols, please refer to the product manual.

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FAQ

Q1: What is the accuracy of the Nexisense FS4001 sensor?
The accuracy is ±(1.5+0.5FS)%, with repeatability of ±0.25%, suitable for high-precision micro gas flow measurement.

Q2: Does it support digital output? Can it be integrated into a PLC system?
Yes, it supports RS232 digital output and also provides 0.5~4.5VDC analog output, which is convenient for integration into DCS, PLC or industrial automation systems.

Q3: What gases is it suitable for? Are there any restrictions?
It is suitable for various clean gases (such as air, N2, O2, etc.). The standard calibration gas is air. Preheat for 1 minute before use and ensure the medium is dry and clean.

Q4: How to choose the range and response time?
Maximum flow optional from 30 to 1000 sccm, turndown ratio 100:1. Response time 4~131ms optional, which can be configured according to process control requirements.

Q5: Is installation and maintenance complicated? Is the pressure drop large?
Installation is simple, only hose connectors are needed. Maximum pressure drop is 350Pa, which is a low pressure drop design with small maintenance volume, suitable for long-term use.

Q6: What are the working environment requirements?
Operating temperature -10~+55℃, humidity 95%RH (no icing, no condensation), maximum working pressure 0.5MPa. Customization is available according to customer needs.

Summary

Nexisense FS4001 series small flow gas mass flow sensor takes the MEMS thermal mass flow chip as the core. With high precision, wide turndown ratio, no compensation required, and flexible output methods such as RS232, it provides professional and reliable micro gas flow measurement solutions for system integrators and engineering users. It effectively solves the pain points of traditional flow sensors in micro flow scenarios and ensures the accuracy and efficiency of gas process control.

Whether in laboratory gas analysis or precision control of industrial combustion and medical equipment, Nexisense FS4001 can become the stable cornerstone of your gas flow system.

Need targeted selection suggestions, RS232 integration guidance, custom range confirmation or project quotation? Welcome to contact the Nexisense technical team. We will provide customized recommendations and complete technical support based on your gas type, flow range, working environment and system integration needs. Take action immediately to make micro gas flow measurement more accurate, more stable and more intelligent.

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