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The “Humidity Guardian” in Semiconductor Manufacturing: Nexisense Duo — The Key Role of HG808-D and HG602 Dew Point Sensors
In semiconductor manufacturing, precise humidity control is critical. Dew point sensors play a vital role in monitoring trace moisture in ultra-clean environments.
Dew point probe in dry room/cleanroom for process reliability
Cleanroom monitoring solutions for semiconductor fabrication
Precision humidity control in wafer fabrication processes
I. Dew Point Control: The Lifeline of Semiconductor Manufacturing
1.1 The Fatal Impact of Humidity on Semiconductor Processes
Semiconductor manufacturing represents the ultimate pursuit of "purity" and "precision" by humanity. In this process, humidity (i.e., trace moisture content in gases) is a critical parameter that cannot be ignored.
In ultra-clean workshops and precision processes (such as lithography, etching, thin film deposition), even minimal humidity fluctuations can lead to catastrophic consequences:
Electrostatic Discharge (ESD): Low humidity easily generates static electricity, damaging sensitive circuits or adsorbing particles.
Surface Impurities and Oxidation: High humidity causes wafer surfaces to contaminate with impurities, form water films, or accelerate metal oxidation, directly affecting chip electrical performance and yield.
Chemical Reactions: Humidity affects the performance stability of certain chemicals and photoresists.
Therefore, real-time, precise, and stable measurement and control of low dew points (trace moisture) in compressed dry gases is a prerequisite for semiconductor companies to maintain high-quality, high-performance chip production.
1.2 Strategic Positioning of Nexisense Dew Point Duo
Nexisense provides two flagship dew point sensing solutions tailored to the special needs of the semiconductor industry:
HG808-D Series: Focused on high-precision monitoring and online analysis, suitable for ultra-clean workshop environments and main pipeline precise dew point measurement.
HG602 Series: Focused on high integration and cost-effectiveness, suitable for equipment integration, process points, and space-constrained pipeline monitoring.
II. HG808-D Online Dew Point Meter: Precise Guardian of Ultra-Clean Environments
2.1 Perfect Balance of High Precision and Wide Range
The Nexisense HG808-D series online dew point meter achieves outstanding performance in low dew point environments through its core technology:
Core Component: Equipped with high-quality humidity-sensitive elements, like the most sensitive tentacles, capable of precisely detecting trace moisture changes in dry environments.
Wide Range High Precision: Operates effortlessly in a wide dew point range of -50 to +20°C. Especially in common industrial non-extreme dew point ranges for semiconductor manufacturing (-20 to 0°C), it maintains stable ±2°C high-precision measurement data.
Advanced Calibration Technology: Paired with advanced calibration techniques, ensuring long-term stability and reliability of measurement data.
2.2 Key Role in Semiconductor Processes
The precise sensing capability of HG808-D provides solid assurance for semiconductor fine processes:
Critical Link Monitoring: Whether in lithography, etching, or packaging processes with extremely high environmental requirements, HG808-D can monitor humidity conditions in real-time and precisely, ensuring the environment remains strictly controlled.
Maintaining Ideal Environment: Through precise detection of trace moisture in dry environments, it assists systems in maintaining ideal humidity in ultra-clean workshops, effectively reducing risks of wafer surface impurities and yield loss due to humidity fluctuations.
Precision dew point transmitter in semiconductor manufacturing
III. HG602 Series Sensors: Exemplar of High Integration and Cost-Effectiveness
3.1 Perfect Fusion of Performance and Size
The Nexisense HG602 series industrial-grade online dew point sensors balance performance, size, and cost in design, making them ideal for equipment integration:
Compact High Integration: Adopts a compact and highly integrated design, allowing clever installation in various industrial pipelines with limited space in semiconductor manufacturing workshops, with convenient installation and minimal space occupation.
Fast, Stable, and Repeatable: Integrates the latest sensor technology for fast, stable, and repeatable measurement of temperature and humidity data.
High Cost-Effectiveness Advantage: Performance indicators comparable to or surpassing imported high-end products, with highly competitive cost-effectiveness making it the preferred integrated component for many semiconductor companies.
3.2 Extensive Integration and Application Value
The application value of the HG602 series lies in its strong integration and precise measurement of low dew point data:
Equipment Integration: Can be integrated as core components into online dew point analyzers, drying systems, and various constant temperature and humidity systems, comprehensively ensuring stable and precise environmental humidity control.
Process Optimization Data Support: Provides critical data support for parameter optimization and fault early warning in semiconductor manufacturing by precisely measuring low dew point data.
IV. Nexisense Duo: Jointly Safeguarding Semiconductor Quality
HG808-D and HG602 are not replacements but complements in the semiconductor manufacturing industry:
| Feature Comparison | HG808-D Online Dew Point Meter | HG602 Industrial-Grade Dew Point Sensor |
|---|---|---|
| Main Positioning | Main pipeline monitoring, ultra-clean workshop high-precision analysis | Equipment integration, space-constrained pipelines, process point monitoring |
| Core Advantages | Wide range, high precision, advanced calibration | Compact size, high integration, high cost-effectiveness, fast and stable |
| Typical Applications | Main dryer outlet dew point monitoring, cleanroom environment monitoring | Compressed gas source access points, internal pipelines of specific process equipment |
Through the deployment of these two professional-grade dew point sensor series, Nexisense builds a three-dimensional, multi-level humidity monitoring network for semiconductor companies, jointly safeguarding high-quality wafer production.
Overview of humidity and dew point control in semiconductor processes
Summary: Precise Control of Trace Moisture Achieves High-Performance Chips
On the endless road of precision in semiconductor manufacturing, precise control of trace moisture content is crucial.
Nexisense HG808-D and HG602 series dew point sensors, with their respective technical advantages and perfect complementarity, provide customers with top-precision and highly integrated dew point measurement solutions. They are important technical supports for promoting sustained development in the semiconductor industry, ensuring high yield and product performance stability. Choosing Nexisense means choosing ultimate assurance for chip quality.
Would you like to learn more about how the Nexisense series dew point sensors can interconnect with your existing PLC system (or specific configuration software) via Modbus protocol in detail?
